The showerhead is a structure used in plasma processing. It serves as both the electrode and a means of gas distribution.
The electrode function is to generate plasma in the process of etching or other treatments. The showerhead design affects the uniformity of plasma distribution and the efficiency of the process.

Shower Head, widely used in semiconductor integrated circuit manufacturing process PVD, CVD, PECVD, etching and other processes, is a key component in various gas distribution process.
The product has the characteristics of high precision, high cleanliness, multi-composite surface treatment
(such as sandblasting/anodizing/brush nickel plating/electrolytic polishing).

Our company can provides different part number of silicon/ SiC electrode and Showerhead. Welcome to inquire.
839-011906-001
839-011906-002
839-011906-100
839-011906-902
839-443215-502
839-011907-001
839-011907-111